Machine name= C1 DIFFUSION 215 1/4 Total serial number= WHD DIFFUSION (SN: 540632); centrotherm E2000 HT 300‐5 (SN: 1_49310.11) FR/CT number= EMJU2692997       –

Machine name= C1 DIFFUSION 802 3/6 Total serial number= WHD (SN: 541 412); centrotherm DIFF‐X‐2.000‐300‐5 (SN: 1_65664.11) FR/CT number= TEXU8981144     –

Machine name= C1 ANTI REFLACTION 305 4/11 Total serial number= “centrotherm E2000 HT 410‐4 (SN: 1_59447.18); WHP XXL BC ANTI REFLACTION305 (SN: 541 123); centrotherm CT‐BW […]

Machine name= C1 Shower 007 1,2,3/3 Total serial number= Chemiewaschtisch (G 0209038, Equipment No. 12) FR/CT number= TEXU8981144    

Machine name= C1 DIFFUSION 311 3/6 Total serial number= WHD (SN: 5001002499); c.DIFF POCI AP 3.000‐300‐5(5) L (SN: 79186) FR/CT number= AMZU4206457        

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 310 5/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 76038); WHP (SR: 500 100 2411) FR/CT number= AMZU4206457   […]

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 309 2/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 76040); WHP (SR: 500 100 2413) FR/CT number= AMZU4206457   […]

Machine name= C1 DIFFUSION 215 2/4 Total serial number= WHD DIFFUSION (SN: 540632); centrotherm E2000 HT 300‐5 (SN: 1_49310.11) FR/CT number= TOLU8779666/    

Machine name= C1 DIFFUSION 312 1/6 Total serial number= WHD (SN: 5001002500); c.DIFF POCI AP 3.000‐300‐5(5) L (SN: 79187) FR/CT number= TOLU8779666/        

Machine name= C1 OXIDIZATION 303 2/5 Total serial number= centrotherm DIFF‐X‐2.000‐300‐5 (SN: 1_53933.11); WHD‐LP DIFFUSION304 (SN: 540 791) FR/CT number= TOLU8779666/    

Machine name= C1 CELL SORTER 305 2,3/8 Total serial number= CELL SORTERrter HAT‐3‐E (SN: 541 129), Tester HAT‐2‐E (SN: 541 128); cetisPV‐XF2‐CXenon‐Flasher Controller Unit (SN: 09030194), […]

Machine name= C1 CELL SORTER 303 4/8 Total serial number= “CELL SORTERrter‐HAT‐3‐C (SN 540 788), Tester‐HAT‐2‐C (SN: 540 782), FOE‐HAT‐1‐C (SN: 541 132) “ FR/CT number= […]

Machine name= C1 CELL SORTER 304 5/9 Total serial number= “CELL SORTERrter‐HAT‐3‐D (SN 540 126), Tester‐HAT‐2‐D (SN: 540 125), FOE‐HAT‐1‐D (SN: 541 127) “ FR/CT number= […]

Machine name= C1 CELL SORTER 309 1/6 Total serial number= CTS CELL SORTERrter (SN: 541 331), CTS CELL SORTERrter (SN: 541 332), CTS CELL SORTERrter (SN: […]

Machine name= C1 DIFFUSION 1041/4 Total serial number= WHD DIFFUSION (SN: 540204); Centronic E 2000 HT 300‐5 (SN: 1_41778.11) FR/CT number= CAXU5716624        

Machine name= C1 DIFFUSION 105 1/4 Total serial number= WHD DIFFUSION (SN: 540595); centrotherm E2000 HT 300‐5 (SN: 1_47894.11) FR/CT number= CAXU5716624        

Machine name= C1 Shower 004 1,2,3/3 Total serial number= Chemiewaschtisch (G 0209038, Equipment No. 13) FR/CT number= TRIU0773446        

Machine name= C1 ANTI REFLACTION 304 1/12 Total serial number= “centrotherm E2000 HT 410‐4 (SN: 1_53928.18); WHP‐XXL‐BC ANTI REFLACTION304 (SN: 540 795); centrotherm CT‐BW DAMAGE ETCHING300K4 […]

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 307 6/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 79188); WHP (SR: 500 100 2721) FR/CT number= GCUU4709292   […]

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 306 6/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 79190); WHP (SR: 500 100 2722) FR/CT number= GCUU4709292   […]