Machine name= C1 DIFFUSION 311 1/6 Total serial number= WHD (SN: 5001002499)c.DIFF POCI AP 3.000‐300‐5(5) L (SN: 79186) FR/CT number= CRXU7657510    

Machine name= C1 ANTI REFLACTION 307 4/11 Total serial number= centrotherm E2000 HT 410‐4 (SN: 1_64834.18); WHP (SN: 541 335); centrotherm CT‐BW DAMAGE ETCHING300K4 (SN: 1_64835.42); […]

Machine name= C1 ANTI REFLACTION 305 2/11 Total serial number= centrotherm E2000 HT 410‐4 (SN: 1_59447.18); WHP XXL BC ANTI REFLACTION305 (SN: 541 123); centrotherm CT‐BW […]

Machine name= C1 DIFFUSION 311 4/6 Total serial number= WHD (SN: 5001002499); c.DIFF POCI AP 3.000‐300‐5(5) L (SN: 79186) FR/CT number= HJCU3500743    

Machine name= C1 ANTI REFLACTION 214 1/13 Total serial number= centrotherm E2000 HT 410‐4 (SN: 1_49309.18); WHP (SN: 540633); centrotherm CT‐BW DAMAGE ETCHING300K4 (SN: 1_49586.42); AAS100WN […]

Machine name= C1 GRAPHITE BOAT ETCHING 303 1/1 Total serial number= SN: 315006‐000 FR/CT number= TOLU8783408    

Machine name= C1 Shower 003 1,2/2 Total serial number= N/A FR/CT number= TEXU8984858    

Machine name= C1 OXIDIZATION 306 1/4 Total serial number= centrotherm DIFF‐X‐2.000‐300‐5 (SN: 1_59455.11); WHD LP DIFFUSION306 (SN: 541 122) FR/CT number= TEXU8984858    

Machine name= C1 DAMAGE ETCHING 307 2/4 Total serial number= BatchEtch (SN: 150095/13996) FR/CT number= AMZU4203571    

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 310 6/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 76038); WHP (SR: 500 100 2411) FR/CT number= AMZU4203000   […]

Machine name= C1 DAMAGE ETCHING 307 1/4 Total serial number= BatchEtch (SN: 150095/13996) FR/CT number= AMZU4203000    

Machine name= C1 ANTI REFLACTION 302 3/12 Total serial number= “centrotherm E2000 HT 410‐4 (SN: 1_53926.18); WHP‐XXL‐BC ANTI REFLACTION302 (SN: 540 793); centrotherm CT‐BW DAMAGE ETCHING300K4 […]

Machine name= C1 DAMAGE ETCHING 306 2/4 Total serial number= BatchEtch (SN: 150100/13997) FR/CT number= AMZU4206971    

Machine name= C1 CELL SORTER 351 5,9/10 Total serial number= Zelltester‐CELL SORTERrter (SN: 540 818) FR/CT number= AMZU4160696    

Machine name= C1 DAMAGE ETCHING 306 1/4 Total serial number= BatchEtch (SN: 150100/13997) FR/CT number= AMZU4160696    

Machine name= C1 SD+ FF 106 2/20 (Siebdruck (Screen Printing) and Fast Firing) Total serial number= “SES 01 (SN: 028044), SIS 01 (021849), XS 1 (SN: […]

Machine name= C2  DF 213 1/5 Diffusion Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44238.11); WHD (SN: 540206) FR/CT number= HDMU7404541/40        

Machine name= C2  OX 216 3/5 Oxidization Total serial number= centrotherm E2000 HT 300-5 (SN: 1_52998.11); WHD (SN: 540739) FR/CT number= HDMU7404541/40      

Machine name= C2  AR 211 1/12 Antireflection Total serial number= WHP (SN: 540201); centrotherm E2000 HT 410-4 (SN: 1_43341.18), centotherm CT-BW E300K4 (SN: 1_44074.42); AAS100WN (SN: […]

Machine name= C2  DF 214 1/5 Diffusion Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44239.11); WHD (SN: 540207) FR/CT number= FSCU8409416/40