Machine name= C2  AR 211 5/12 Antireflection Total serial number= WHP (SN: 540201); centrotherm E2000 HT 410-4 (SN: 1_43341.18), centotherm CT-BW E300K4 (SN: 1_44074.42); AAS100WN (SN: […]

Machine name= C2  OX 216 2/5 Oxidization Total serial number= centrotherm E2000 HT 300-5 (SN: 1_52998.11); WHD (SN: 540739) FR/CT number= MEAU4215134/40        

Machine name= C2  DF 214 2/5 Diffusion Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44239.11); WHD (SN: 540207) FR/CT number= MEAU4215134/40    

Machine name= C2  DF 213 2/5 Diffusion Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44238.11); WHD (SN: 540206) FR/CT number= MEAU4215134/40        

Machine name= C2  OX 251 5/5 Oxidization Total serial number= centrotherm DIFF-X-2.000-300-5 (SN: 1_66371.11); WHD (SN: 541363) FR/CT number= PCIU8174204/40    

Machine name= C2  DF 214 4/5 Diffusion Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44239.11); WHD (SN: 540207) FR/CT number= PCIU8174204/40    

Machine name= C2  OX 216 4/5 Oxidization Total serial number= centrotherm E2000 HT 300-5 (SN: 1_52998.11); WHD (SN: 540739)   FR/CT number= PCIU8174204/40    

Machine name= C2  DF 213 4/5 Diffusion Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44238.11); WHD (SN: 540206) FR/CT number= PCIU8174204/40    

Machine name= C2  SO 251 4/11 Cell Sorter Total serial number= Feurofenentladung-HAT-1B (SN: 540 784), CTS Tester (SN: 541 361) FR/CT number= TOLU4994589/40       […]

Machine name= C2  SO 251 6/11 Cell Sorter Total serial number= Feurofenentladung-HAT-1B (SN: 540 784), CTS Tester (SN: 541 361) FR/CT number= TOLU4994589/40       […]

Machine name= C2  SO 251 2+3/11 Cell Sorter Total serial number= Feurofenentladung-HAT-1B (SN: 540 784), CTS Tester (SN: 541 361) FR/CT number= TOLU4994589/40      

Machine name=Diffusion(C2-DF 213 1/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44238.11); WHD (SN: 540206) FR/CT number=HDMU7404541/40 FLC    

Machine name=Oxidization(C2-OX 216 3/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_52998.11); WHD (SN: 540739) FR/CT number=HDMU7404541/40 FLC    

Machine name=Antireflection(C2-AR 211 1/12) Total serial number= WHP (SN: 540201); centrotherm E2000 HT 410-4 (SN: 1_43341.18), centotherm CT-BW E300K4 (SN: 1_44074.42); AAS100WN (SN: DEE01033), AAS100WN (SN: […]

Machine name=Diffusion(C2-DF 214 1/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44239.11); WHD (SN: 540207) FR/CT number=CRXU7655306/40 FLC    

Machine name=Antireflection(C2-AR 212 1/12) Total serial number= WHP (SN: 540202); centrotherm E2000 HT 410-4 (SN: 1_43837.18), centotherm CT-BW E300K4 (SN: 1_44077.42); AAS100WN (SN: DEE01867), AAS100WN (SN: […]

Machine name=Oxidization(C2-OX 251 4/5) Total serial number= centrotherm DIFF-X-2.000-300-5 (SN: 1_66371.11); WHD (SN: 541363) FR/CT number=CRXU7655306/40 FLC        

Machine name=Backside Passivation(C2-BP 211 1/9) Total serial number= WHP (SN: 541 360); centrotherm CHS 3.000×600 (SN: 1_66454.18) FR/CT number=TOLU8782612/40 FLC    

Machine name=Cellsorter(C2-SO 216 2/7) Total serial number= FOE (SN: 541 351), CTS Tester (SN: 541 352), CTS Sorter (SN: 541353); Enclosure Cooling Unit SK 3304500 (SN: […]

Machine name=Antireflection(C2-AR 212 6/12) Total serial number= WHP (SN: 540202); centrotherm E2000 HT 410-4 (SN: 1_43837.18), centotherm CT-BW E300K4 (SN: 1_44077.42); AAS100WN (SN: DEE01867), AAS100WN (SN: […]