Machine name= C1 DIFFUSION 211 2/5 Total serial number= WHD (SN: 540093); Centrotherm E2000 HT 300‐5 (SN: 1_43836.11) FR/CT number= CRXU7655306        

Machine name= C1 DIFFUSION 105 3/4 Total serial number= WHD DIFFUSION (SN: 540595); centrotherm E2000 HT 300‐5 (SN: 1_47894.11) FR/CT number= CRXU7655306        

Machine name= C1 DIFFUSION 313 2/5 Total serial number= WHD (SN: 5001002501); centrotherm E2000 HT 300‐4 (SN: 1_56427.11) FR/CT number= CRXU7655306      

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 305 1/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 79189); WHP (SR: 500 100 2723) FR/CT number= HDMU7404808   […]

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 309 3/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 76040); WHP (SR: 500 100 2413) FR/CT number= TOLU8782612   […]

Machine name= C1 OXIDIZATION 3051/4 Total serial number= centrotherm DIFF‐X‐2.000‐300‐5 (SN: 1_59454.11); WHD LP DIFFUSION305 (SN: 541 121) FR/CT number= TOLU8782612        

Machine name= C1 ANTI REFLACTION 103 5/14 Total serial number= “Centronic E2000 410‐ (SN: 1_38736.18); WHP (SN: 4604030/2); centrotherm CT‐ BW OP300K4 (SN: 1_52992.43); AAS100WN (SN: […]

Machine name= C1 ANTI REFLACTION 103 7/14 Total serial number= “Centronic E2000 410‐ (SN: 1_38736.18); WHP (SN: 4604030/2); centrotherm CT‐ BW OP300K4 (SN: 1_52992.43); AAS100WN (SN: […]

Machine name= C1 DIFFUSION 105 2/4 Total serial number= WHD DIFFUSION (SN: 540595); centrotherm E2000 HT 300‐5 (SN: 1_47894.11) FR/CT number= IHDMU7405240        

Machine name= C1 DIFFUSION 307 3/4 Total serial number= WHD DIFFUSION (SN: 541 133); centrotherm DIFF‐X‐2.000‐300‐5 (SN: 1_61575.11) FR/CT number= IHDMU7405240        

Machine name= C1 DIFFUSION 104 3/4 Total serial number= WHD DIFFUSION (SN: 540204); Centronic E 2000 HT 300‐5 (SN: 1_41778.11) FR/CT number= IHDMU7405240       […]

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 306 5/7 Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 79190); WHP (SR: 500 100 2722) FR/CT number= FSCU8407558   […]

Machine name= C1 Shower 009 1/1 Total serial number= N/A FR/CT number= HDMU7404541        

Machine name= C1 Shower 001 1/1 Total serial number= N/A FR/CT number= HDMU7404541        

Machine name= C1 CELL SORTER 351 8/10 Total serial number= Zelltester‐CELL SORTERrter (SN: 540 818) FR/CT number= HDMU7404541        

Machine name= C1 Shower 005 1,2,3/3 Total serial number= Chemiewaschtisch (G 0209038, Equipment No. 2) FR/CT number= TOLU87858494    

Machine name= C1 OXIDIZATION 305 2/4 Total serial number= centrotherm DIFF‐X‐2.000‐300‐5 (SN: 1_59454.11); WHD LP DIFFUSION305 (SN: 541 121) FR/CT number= TOLU87858494    

Machine name= C1 DIFFUSION2122/5 Total serial number= WHD (SN: 540205); Centrotherm E2000 HT 300‐5 (SN: 1_43342.11) FR/CT number= AMFU1394556    

Machine name= C1 DIFFUSION 104 2/4 Total serial number= WHD DIFFUSION (SN: 540204); Centronic E 2000 HT 300‐5 (SN: 1_41778.11) FR/CT number= AMFU1394556    

Machine name= C1 DIFFUSION 312 3/6 Total serial number= WHD (SN: 5001002500); c.DIFF POCI AP 3.000‐300‐5(5) L (SN: 79187) FR/CT number= BHCU4750500