Machine name=Oxidization(C2-OX 216 4/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_52998.11); WHD (SN: 540739) FR/CT number=PCIU8174204/40 HC    

Machine name=Diffusion(C2-DF 214 4/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44239.11); WHD (SN: 540207) FR/CT number=PCIU8174204/40 HC    

Machine name=Diffusion(C2-DF 213 4/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44238.11); WHD (SN: 540206) FR/CT number=PCIU8174204/40 HC    

Machine name= Cell store (C1-SO251 4/11) Total serial number= STH 01 (SN: 029478), SSD 01 (SN: 029479), STH 01 (SN: 029478), SPC 01 (SN:029477), SPC 01 […]

Machine name= Cell store (C1-SO251 6/11) Total serial number= STH 01 (SN: 029478), SSD 01 (SN: 029479), STH 01 (SN: 029478), SPC 01 (SN:029477), SPC 01 […]

Machine name= Cell store (C1-SO251 2+3/11) Total serial number= STH 01 (SN: 029478), SSD 01 (SN: 029479), STH 01 (SN: 029478), SPC 01 (SN:029477), SPC 01 […]

Machine name= C1 DAMAGE ETCHING 304 4/4 Total serial number= BatchEtch (SN: 150596/14024) FR/CT number= TOLU8757353    

Machine name= C1 SD + FF 106 1/20 Siebdruck (Screen Printing) and Fast Firing Total serial number= “SES 01 (SN: 028044), SIS 01 (021849), XS 1 […]

Machine name= C1 DAMAGE ETCHING 304 3/4 Total serial number= BatchEtch (SN: 150596/14024) FR/CT number= AMZU4210360    

Machine name= C1 ANTI REFLACTION 307 3/11 Total serial number= “centrotherm E2000 HT 410‐4 (SN: 1_64834.18); WHP (SN: 541 335); centrotherm CT‐BW DAMAGE ETCHING300K4 (SN: 1_64835.42); […]

Machine name= C1 DAMAGE ETCHING 303 3/4 Total serial number= BatchEtch (SN: 150597/14025) FR/CT number= GAEU7513325    

Machine name= C1 SD+ FF 105 4/19 Siebdruck (Screen Printing) and Fast Firing Total serial number= “SIS 01 (SN: 021704), XS 1 (SN: 021729), SPC01 (SN:044374), […]

Machine name= C1 DAMAGE ETCHING 303 4/4 Total serial number= BatchEtch (SN: 150597/14025) FR/CT number= GAEU7511195    

Machine name= MACHINERY NAME : C1 DIFFUSION 215 1/4 (Diffusion) Total serial number= SERIAL NO.:WHD DIFFUSION (SN: 540632); centrotherm E2000 HT 300‐5 (SN: 1_49310.11) (Project 2190) […]

Machine name=  C1 DIFFUSION 802 3/6(Diffusion) Total serial number= SERIAL NO.WHD (SN: 541 412); centrotherm DIFF‐X‐2.000‐300‐5 (SN: 1_65664.11) FR/CT number= TEXU8981144    

Machine name= C1 ANTI REFLACTION 305 4/11(ANTI REFMACHINERY NAME : C1ACTION) Total serial number= centrotherm E2000 HT 410‐4 (SN: 1_59447.18); WHP XXL BC ANTI REFLACTION305 (SN: […]

Machine name= C1Shower 007 1,2,3/3(SAFTY SHOWER) Total serial number= Chemiewaschtisch (G 0209038, Equipment No. 12) FR/CT number= TEXU8981144    

Machine name= C1 DIFFUSION 311 3/6(Diffusion) Total serial number= WHD (SN: 5001002499); c.DIFF POCI AP 3.000‐300‐5(5) L (SN: 79186) FR/CT number= AMZU4206457    

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 310 5/7(BACKSIDAMAGE ETCHING PASSIVATION) Total serial number= PLASMA SiON 3.000‐410‐4(4) R (SN: 76038); WHP (SR: 500 100 2411) FR/CT number= […]

Machine name= C1 BACKSIDAMAGE ETCHING PASSIVATION 309 2/7(BACKSIDAMAGE ETCHING PASSIVATION) Total serial number= c.PLASMA SiON 3.000‐410‐4(4) R (SN: 76040); WHP (SR: 500 100 2413) FR/CT number= […]