Machine name=Backside Passivation(C2-BP 212 1/10) Total serial number= WHP (SN: 541 359); centrotherm CHS 3.000×600 (SN: 1_66455.18) FR/CT number=HDMU7405070/40 FLC        

Machine name=Einhorder(Wafer sorting)(C2-EH 251) Total serial number= Eindhorder (SN: 541 xxx) FR/CT number=FSCU8407558/40 FLC    

Machine name=Cell sorter(C2-SO 251 7/11) Total serial number= Feurofenentladung-HAT-1B (SN: 540 784), CTS Tester (SN: 541 361) FR/CT number=FSCU8407558/40 FLC      

Machine name=Backside Passivation(C2-BP211 3/9) Total serial number= WHP (SN: 541 360); centrotherm CHS 3.000×600 (SN: 1_66454.18) FR/CT number=HDMU7404808/40 FLC      

Machine name=Backside Passivation(C2-BP 212 4/10) Total serial number= WHP (SN: 541 359); centrotherm CHS 3.000×600 (SN: 1_66455.18) FR/CT number=HDMU7404808/40 FLC    

Machine name=Backside Passivation(C2-BP212 3/10) Total serial number= WHP (SN: 541 359); centrotherm CHS 3.000×600 (SN: 1_66455.18) FR/CT number=HDMU7404808/40 FLC    

Machine name= Oxidization(C2-OX 251 1/5) Total serial number= centrotherm DIFF-X-2.000-300-5 (SN: 1_66371.11); WHD (SN: 541363) FR/CT number=AMZU4951260/40 OT    

Machine name=Diffusion(C2-DF 213 3/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44238.11); WHD (SN: 540206) FR/CT number=AMZU4951260/40 OT    

Machine name=Cell sorter(C2-SO 251 5/11) Total serial number= Feurofenentladung-HAT-1B (SN: 540 784), CTS Tester (SN: 541 361) FR/CT number=AMZU4951260/40 OT    

Machine name= Antireflection(C2-AR 212 5/12) Total serial number= FR/CT number=TKCU4926110/40    

Machine name= Oxidization(C2-OX 216 1/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_52998.11); WHD (SN: 540739) FR/CT number=TKCU4926110/40    

Machine name=Antireflection(C2-AR 211 6/12) Total serial number= WHP (SN: 540201); centrotherm E2000 HT 410-4 (SN: 1_43341.18), centotherm CT-BW E300K4 (SN: 1_44074.42); AAS100WN (SN: DEE01033), AAS100WN (SN: […]

Machine name=Oxidization(C2-OX 251 2/5) Total serial number=  centrotherm DIFF-X-2.000-300-5 (SN: 1_66371.11); WHD (SN: 541363) FR/CT number=BCHU4213943/40 OT    

Machine name=Diffusion(C2-DF 214 3/5) Total serial number=  centrotherm E2000 HT 300-5 (SN: 1_44239.11); WHD (SN: 540207) FR/CT number=BCHU4213943/40 OT    

Machine name=Backside Passivation(C2-BP211 4/9) Total serial number= WHP (SN: 541 360); centrotherm CHS 3.000×600 (SN: 1_66454.18) FR/CT number=BCHU4213943/40 OT     –

Machine name=Antireflection(C2-AR 211 5/12) Total serial number= WHP (SN: 540201); centrotherm E2000 HT 410-4 (SN: 1_43341.18), centotherm CT-BW E300K4 (SN: 1_44074.42); AAS100WN (SN: DEE01033), AAS100WN (SN: […]

Machine name=Oxidization(C2-OX 216 2/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_52998.11); WHD (SN: 540739) FR/CT number= MEAU4215134/40 OT    

Machine name=Diffusion(C2-DF 214 2/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44239.11); WHD (SN: 540207) FR/CT number= MEAU4215134/40 OT        

Machine name=Diffusion(C2-DF 213 2/5) Total serial number= centrotherm E2000 HT 300-5 (SN: 1_44238.11); WHD (SN: 540206) FR/CT number=MEAU4215134/40 OT    

Machine name=Oxidization(C2-OX 251 5/5) Total serial number= centrotherm DIFF-X-2.000-300-5 (SN: 1_66371.11); WHD (SN: 541363) FR/CT number=PCIU8174204/40 HC